Research Catalog

Advanced metallization and interconnect systems for ULSI applications in ...

Title
  1. Advanced metallization and interconnect systems for ULSI applications in ...
Published by
  1. Pittsburgh, Pa. : Materials Research Society

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Vol/date2002FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 2002Item locationOff-site
StatusVol/date2001FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 2001Item locationOff-site
StatusVol/date2000FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 2000Item locationOff-site
StatusVol/date1999FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 1999Item locationOff-site
StatusVol/date1998FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 1998Item locationOff-site
StatusVol/date1997FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 1997Item locationOff-site
StatusVol/date1996FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 1996Item locationOff-site
StatusVol/date1995FormatBook/TextAccessRequest in advanceCall numberTK7871.15.T85 W66 1995Item locationOff-site

Details

Additional authors
  1. University of California, Berkeley. Continuing Education in Engineering.
Publication date
  1. Began with 1995.
Description
  1. volumes : illustrations; 24 cm.
Series statement
  1. Materials Research Society conference proceedings
Uniform title
  1. Materials Research Society conference proceedings.
Subject
  1. Integrated circuits > Design and construction > Congresses
  2. Vapor-plating > Congresses
  3. Electrochemical metallizing > Congresses
  4. Dielectrics > Congresses
  5. Titanium nitride > Congresses
Owning institution
  1. Columbia University Libraries
Note
  1. Description based on: 1996.
Issued by (note)
  1. Contains papers presented at annual conference, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley.