Research Catalog

Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 Workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A.

Title
  1. Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 Workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A. / sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and Sandia National Laboratories, Albuquerque, New Mexico ; editors, Robert S. Blewer, Carol M. McConica ; associate editors, Kie Y. Ahn [and others].
Published by
  1. Pittsburgh, Pa. : Materials Research Society, [1989], ©1989.

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Details

Additional authors
  1. Blewer, R. S.
  2. McConica, C. M.
  3. Materials Research Society.
  4. University of California, Berkeley. Continuing Education in Engineering.
  5. International Workshop on Tungsten and Other Refractory Metals for VLSI Applications (5th : 1988 : Albuquerque, N.M.)
Description
  1. xv, 373 pages : illustrations; 24 cm.
Series statement
  1. Materials Research Society conference proceedings, 0886-7860
Uniform title
  1. Materials Research Society conference proceedings.
Alternative title
  1. Tungsten and other refractory metals for very large scale integration applictions.
  2. Tungsten and other refractory metals for V.L.S.I. applications.
Subject
  1. Integrated circuits > Materials > Congresses
  2. Tungsten > Congresses
  3. Heat resistant alloys > Congresses
Owning institution
  1. Columbia University Libraries
Note
  1. "Contains the papers presented at the Fifth International Workshop on Tungsten and Other Refractory Metals for VLSI Applications"--Pref.
Bibliography (note)
  1. Includes bibliographies and indexes.