Research Catalog

Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.

Title
  1. Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A. / sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley ; editor, Eliot K. Broadbent ; associate editors, Robert S. Blewer [and others].
Published by
  1. Pittsburgh, Pa. : Materials Research Society, [1987], ©1987.

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Details

Additional authors
  1. Broadbent, Eliot K.
  2. Blewer, R. S.
  3. Materials Research Society.
  4. University of California, Berkeley. Continuing Education in Engineering.
  5. Workshop on Tungsten and Other Refractory Metals for VLSI Applications (3rd : 1986 : Palo Alto, Calif.)
Description
  1. xvii, 426 pages : illustrations; 24 cm.
Series statement
  1. Materials Research Society conference proceedings, 0886-7860
Uniform title
  1. Materials Research Society conference proceedings.
Subject
  1. Integrated circuits > Materials > Congresses
  2. Tungsten > Congresses
  3. Heat resistant alloys > Congresses
Owning institution
  1. Columbia University Libraries
Note
  1. "Papers presented at the Third Workshop on Tungsten and Other Refractory Metals for VLSI Applications."--Pref.
  2. The first workshop was entitled: Workshop on Tungsten for VLSI Applications.
Bibliography (note)
  1. Includes bibliographies and indexes.