Research Catalog

Advanced metallization for ULSI applications in 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. / editors, Roc Blumenthal, Guido Janssen.

Title
  1. Advanced metallization for ULSI applications in 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. / editors, Roc Blumenthal, Guido Janssen.
Published by
  1. Pittsburgh, Pa. : Materials Research Society, c1995.
Author
  1. Advanced Metallization for ULSI Applications Conference (1994 : Austin, Tex.)

Details

Additional authors
  1. Blumenthal, Roc.
  2. Janssen, Guido.
  3. University of California, Berkeley. Continuing Education in Engineering.
Description
  1. xv, 564 p. : ill.; 24 cm.
Series statement
  1. Materials Research Society conference proceedings, 1048-0854
Uniform title
  1. Materials Research Society conference proceedings.
Subject
  1. Electrochemical metallizing > Congresses
  2. Integrated circuits > Congresses
  3. Vapor-plating > Congresses
Note
  1. "Papers presented at the Advanced Metallization for ULSI Application Conference"--Pref.
  2. "Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California U.S.A."
Processing action (note)
  1. committed to retain