Research Catalog

Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang.

Title
  1. Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang.
Published by
  1. Pittsburgh, Pa. : Materials Research Society, c1996.

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Details

Additional authors
  1. Ellwanger, Russell C.
  2. University of California, Berkeley. Continuing Education in Engineering.
  3. Wang, Shi-Qing.
Description
  1. xix, 767 p. : ill.; 24 cm.
Series statement
  1. Conference proceedings, 1048-0854
Uniform title
  1. Materials Research Society conference proceedings.
Subject
  1. Dielectrics > Congresses
  2. Electrochemical metallizing > Congresses
  3. Integrated circuits > Congresses
  4. Titanium nitride > Congresses
  5. Vapor-plating > Congresses
Owning institution
  1. Harvard Library
Bibliography (note)
  1. Includes bibliographical references and indexes.
Processing action (note)
  1. committed to retain